Effect of si content in Ti-Al-Ta-Si-N coatings on their fracture under uniaxial tension

被引：0
|
作者：
Kuzminov, E. D. [1 ]
Shugurov, A. R. [1 ]
Derbin, A. Yu. [1 ]
Panin, A. V. [1 ]
Dmitriev, A. I. [1 ]
机构：
[1] Russian Acad Sci, Siberian Branch, Inst Strength Phys & Mat Sci, Tomsk, Russia
来源：
RUSSIAN PHYSICS JOURNAL | 2024年 / 67卷 / 11期
关键词：
Ti-Al-Ta-Si-N coatings; Magnetron sputtering; Nanocrystalline structure; Uniaxial tension; Adhesion; 538.975; 539.216.2; FILMS; HARD;
D O I：
10.1007/s11182-024-03345-4
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Effect of Si content on the patterns of deformation and fracture of Ti1-x-y-zAlxTaySizN coatings under uniaxial tension is investigated. The nanoindentation method has shown that the coating with z = 0.10 has the maximum hardness, which is caused by the formation of a thin grain-boundary amorphous SiNx phase. At the same time, the Ti0.35Al0.40Ta0.10Si0.15N coating showed the highest fracture resistance and adhesive strength. It is found that this effect is due to the suppression of the growth of columnar grains in this coating and the formation of a two-phase amorphous-nanocrystalline structure, which makes it difficult for cracks to propagate.
引用
收藏
页码：2056 / 2065
页数：10
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