Corrosion inhibition threshold effect of 1,2,4-triazole in alkaline chemical mechanical polishing of copper: Investigations using synchrotron radiation microinfrared

被引：0

作者：

Dai, Lei ^{[1
]}

Yan, Zixuan ^{[1
]}

Zhang, Daquan ^{[1
,2
]}

Li, Chunping ^{[1
]}

Shi, Cheng ^{[1
]}

Gao, Lixin ^{[2
]}

Xin, Zhiling ^{[1
]}

机构：

[1] Shanghai Univ Elect Power, Shanghai Key Lab Mat Protect & Adv Mat Elect Power, Shanghai 200090, Peoples R China

[2] Shanghai Engn Res Ctr Energy Saving Heat Exchange, Shanghai 200090, Peoples R China

来源：

IONICS | 2025年 / 31卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Synchrotron radiation micro-infrared; Chemical mechanical polishing; 1,2,4-Triazole; Threshold effect; Corrosion inhibition; INFRARED MICROSPECTROSCOPY; GALVANIC CORROSION; SURFACE; TRIAZOLE; ACID; CU; DERIVATIVES; ADSORPTION; BEHAVIOR; SLURRY;

D O I：

10.1007/s11581-024-05925-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The threshold effect of 1,2,4-triazole (TAZ) on copper corrosion inhibition under alkaline chemical mechanical polishing (CMP) process is investigated using the synchrotron radiation micro-infrared spectroscopy. Electrochemical experiments show that 15 mM TAZ provides the best corrosion inhibition for copper in CMP slurry. The best inhibition efficiency is 85.34%. Surface morphology tests show that 15 mM TAZ provides effective protection for copper surface. The results of synchrotron radiation microinfrared reveal that the integrity of the surface film decreases significantly at concentrations above the threshold level. This is mainly due to the agglomeration of Cu-TAZ complexes on copper surface. In addition, the corrosion inhibition mechanism of TAZ for copper in alkaline CMP slurry is discussed in depth.

引用

页码：1125 / 1138

页数：14

共 54 条

[1] Quantum Chemical Determination of the Molecular Structure of 1,2,4-Triazole and the Calculation of its Infrared Spectrum [J].

Abdulov, Kh. Sh. ;

Mulloev, N. U. ;

Tabarov, S. Kh. ;

Khodiev, M. Kh. .

JOURNAL OF STRUCTURAL CHEMISTRY, 2020, 61 (04) :510-514

[2] Experimental and theoretical assignment of the vibrational spectra of triazoles and benzotriazoles. Identification of IR marker bands and electric response properties [J].

Aziz, Saadullah G. ;

Elroby, Shabaan A. ;

Alyoubi, Abdulrahman ;

Osman, Osman I. ;

Hilal, Rifaat .

JOURNAL OF MOLECULAR MODELING, 2014, 20 (03)

[3] Chemical structure transformation during the later stage of plastic layers during coking using Synchrotron infrared microspectroscopy technique [J].

Chen, Yixin ;

Lee, Soonho ;

Tahmasebi, Arash ;

Bai, Jin ;

Vongsvivut, Jitraporn ;

Yu, Jianglong .

FUEL, 2020, 273

[4] Effect of fluoride ion concentration and fluctuating conditions on titanium bipolar plate in PEM water electrolyser environment [J].

Cheng, Hongxu ;

Luo, Hong ;

Wang, Xuefei ;

Dong, Chaofang ;

Li, Xiaogang .

CORROSION SCIENCE, 2023, 222

[5] Galvanic Corrosion Inhibitors for Cu/Ru Couple during Chemical Mechanical Polishing of Ru [J].

Cheng, Jie ;

Wang, Tongqing ;

Lu, Xinchun .

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2017, 6 (01) :P62-P67

[6] The Microstructure and Pitting Corrosion Behavior of K-TIG Welded Joints of the UNS S32101 Duplex Stainless Steel [J].

Cui, Shuwan ;

Pang, Shuwen ;

Pang, Dangqing ;

Tian, Fuyuan ;

Yu, Yunhe .

MATERIALS, 2023, 16 (01)

[7] Influence of temperature on the electrochemical and passivation behavior of 2507 super duplex stainless steel in simulated desulfurized flue gas condensates [J].

Cui, Zhongyu ;

Wang, Liwei ;

Ni, Hongtao ;

Hao, Wenkui ;

Man, Cheng ;

Chen, Shuangshuai ;

Wang, Xin ;

Liu, Zhiyong ;

Li, Xiaogang .

CORROSION SCIENCE, 2017, 118 :31-48

[8] Sodium silicate corrosion inhibition behaviour for carbon steel in a dynamic salt water environment [J].

De Ketelaere, E. ;

Moed, D. ;

Vanoppen, M. ;

Verliefde, A. R. D. ;

Verbeken, K. ;

Depover, T. .

CORROSION SCIENCE, 2023, 217

[9] Revealing a new fluorescence peak of the enhanced green fluorescent protein using three-dimensional fluorescence spectroscopy [J].

dos Santos, Nathalia Vieira ;

Saponi, Carolina Falaschi ;

Greaves, Tamar Louise ;

Brandao Pereira, Jorge Fernando .

RSC ADVANCES, 2019, 9 (40) :22853-22858

[10] Adding synchrotron radiation to infrared microspectroscopy:: what's new in biomedical applications? [J].

Dumas, Paul ;

Sockalingum, Ganesh D. ;

Sule-Suso, Josep .

TRENDS IN BIOTECHNOLOGY, 2007, 25 (01) :40-44

← 1 2 3 4 5 6 →