[1] Shanghai Univ, Sch Microelect, Shanghai, Peoples R China
[2] Shanghai Univ, Shanghai Collaborat Innovat Ctr Intelligent Sensin, Shanghai, Peoples R China
[3] Tongji Univ, Inst Precis Opt Engn, Sch Phys Sci & Engn, Shanghai, Peoples R China
[4] MOE Key Lab Adv Microstruct Mat, Shanghai, Peoples R China
[5] Tongji Univ, Shanghai Inst Intelligent Sci & Technol, Shanghai, Peoples R China
[6] Shanghai Frontiers Sci Ctr Digital Opt, Shanghai, Peoples R China
[7] Shanghai Ind Technol Res Inst SITRI, Shanghai, Peoples R China
[8] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore, Singapore
[9] Natl Univ Singapore, Ctr Intelligent Sensors, Singapore 117608, Singapore
[10] Natl Univ Singapore, MEMS CISM, Singapore, Singapore
[11] Natl Ctr Adv Integrated Photon NCAIP, Singapore, Singapore