Denoising-autoencoder-facilitated MEMS computational spectrometer with enhanced resolution on a silicon photonic chip

被引:1
|
作者
Zhou, Jing [1 ,2 ]
Zhang, Hui [3 ,4 ,5 ,6 ]
Qiao, Qifeng [7 ]
Chen, Heng [1 ,2 ]
Huang, Qian [1 ,2 ]
Wang, Hanxing [1 ,2 ]
Ren, Qinghua [1 ,2 ]
Wang, Nan [1 ,2 ]
Ma, Yiming [1 ,2 ]
Lee, Chengkuo [8 ,9 ,10 ,11 ]
机构
[1] Shanghai Univ, Sch Microelect, Shanghai, Peoples R China
[2] Shanghai Univ, Shanghai Collaborat Innovat Ctr Intelligent Sensin, Shanghai, Peoples R China
[3] Tongji Univ, Inst Precis Opt Engn, Sch Phys Sci & Engn, Shanghai, Peoples R China
[4] MOE Key Lab Adv Microstruct Mat, Shanghai, Peoples R China
[5] Tongji Univ, Shanghai Inst Intelligent Sci & Technol, Shanghai, Peoples R China
[6] Shanghai Frontiers Sci Ctr Digital Opt, Shanghai, Peoples R China
[7] Shanghai Ind Technol Res Inst SITRI, Shanghai, Peoples R China
[8] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore, Singapore
[9] Natl Univ Singapore, Ctr Intelligent Sensors, Singapore 117608, Singapore
[10] Natl Univ Singapore, MEMS CISM, Singapore, Singapore
[11] Natl Ctr Adv Integrated Photon NCAIP, Singapore, Singapore
基金
中国国家自然科学基金; 新加坡国家研究基金会;
关键词
SPECTRUM RECONSTRUCTION; SPECTROSCOPY; MODULATORS;
D O I
10.1038/s41467-024-54704-1
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Silicon photonics enables the construction of chip-scale spectrometers, in which those using a single tunable interferometer provide a simple and cost-effective solution. Among various tuning mechanisms, electrostatic MEMS reconfiguration stands out as an ideal candidate, given its high tuning efficiency and ultra-low power consumption. Nonetheless, MEMS devices face significant noise challenges arising from their susceptible minuscule components, adversely impacting spectral resolution. Here, we propose a distinct paradigm of spectrometers through synergizing an easily-fabricated MEMS-reconfigurable low-loss waveguide coupler on a silicon photonic chip and a convolutional autoencoder denoising (CAED) mechanism. The spectrometer offers a 300 nm bandwidth and a reconstruction resolution of 0.3 nm in a noise-free condition. In a noisy environment with a signal-to-noise ratio as low as 30 dB, the reconstruction resolution of the interferograms processed by the CAED exhibits an enhancement from 1.2 to 0.4 nm, approaching the noise-free value. Our technology is envisaged to provide a powerful and cost-effective solution for applications requiring accurate, broadband, and energy-efficient spectral analysis. The Internet-of-Things era desiderates miniature spectrometers. Here, the authors present a chip-scale spectrometer through synergizing MEMS modulation and autoencoder denoising, achieving accurate, broadband, and energy-efficient spectral analysis.
引用
收藏
页数:12
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