Study on the interfacial reactions for Ag/Sn/Cu TLP during transient liquid phase soldering process

被引:1
作者
Diao, He [1 ]
Liu, Jiahao [1 ,2 ]
Zhong, Xiangxiang [1 ]
Wang, Fengyi [1 ]
Qiu, Lijin [1 ]
Chen, Yini [1 ]
Chen, Hongtao [1 ,3 ]
Guo, Xiaotong [2 ,4 ]
Li, Mingyu [1 ,3 ]
机构
[1] Harbin Inst Technol Shenzhen, Sch Intergrated Circuits, Shenzhen 518055, Peoples R China
[2] China Elect Prod Reliabil & Environm Testing Res I, Guangzhou 511370, Peoples R China
[3] Harbin Inst Technol Shenzhen, Sauvage Lab Smart Mat, Shenzhen 518055, Peoples R China
[4] Chongqing CEPREI Ind Technol Res Inst Co Ltd, Chongqing 401332, Peoples R China
关键词
INTERMETALLIC COMPOUNDS; GROWTH; EVOLUTION; MECHANISM; KINETICS;
D O I
10.1007/s10854-025-14343-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Transient liquid phase (TLP) bonding is a promising electronic packaging technology to satisfy the needs of operating at high temperatures due to the increasing power density of power electronic devices. More and more power chips are finished with Ni/Ag metallization, while the top metal is Cu in direct bonded copper. However, interfacial reactions in Cu/Sn/Ag system were rarely studied. In order to explore the intermetallic reaction kinetics between solder and substrate in Cu/Sn/Ag system, this study investigated the effect of different reflow temperatures (250-350 degrees C) and time (30-960 s) on the microstructure evolution of the interfaces of three different TLP systems (Cu/Sn, Ag/Sn and Cu/Sn/Ag), and the growth kinetics of two intermetallic compounds (IMCs) Cu6Sn5 and Ag3Sn. The results indicate that the activation energy of Cu6Sn5 in Cu/Sn/Ag TLP increases by 42.8% compared to Cu/Sn TLP, and the activation energy of Ag3Sn increases by 34.1% compared to Ag/Sn TLP. During the solid-liquid process of Ag/Sn/Cu TLP, Ag atoms from the Ag substrate side will cross through the molten Sn layer to form Ag3Sn on the surface of Cu6Sn5 IMCs on the Cu substrate side. Meanwhile, Cu atoms from the Cu substrate side will reach Ag substrate side to form Cu6Sn5 on the surface of Ag3Sn IMCs. Heterogeneous IMCs at the interface hinder the grain boundary/melting channel for the diffusion of substrate atoms, increasing the activation energy and inhibiting their growth.
引用
收藏
页数:14
相关论文
共 24 条
[1]   Backside Metallization of Ag-Sn-Ag Multilayer Thin Films and Die Attach for Semiconductor Applications [J].
Choi, Jinseok ;
An, Sung Jin .
JOURNAL OF ELECTRONIC MATERIALS, 2020, 49 (07) :4265-4271
[2]   Modeling of Reactive Diffusion: Mechanism and Kinetics of the Intermetallics Growth in Ag/Ag Interconnections [J].
Filipek, R. ;
Szyszkiewicz, K. ;
Dziembaj, P. ;
Skrzyniarz, P. ;
Wierzbicka-Miernik, A. ;
Zieba, P. .
JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 2012, 21 (05) :638-647
[3]   Experiments, constitutive modeling, and simulations on the creep behavior of the AgSn transient liquid phase metallic bonds [J].
Gharaibeh, Mohammad A. ;
Wilde, Juergen .
MICROELECTRONICS RELIABILITY, 2024, 154
[4]   A REVIEW ON RECENT ADVANCES IN TRANSIENT LIQUID PHASE (TLP) BONDING FOR THERMOELECTRIC POWER MODULE [J].
Jung, D. H. ;
Sharma, A. ;
Mayer, M. ;
Jung, J. P. .
REVIEWS ON ADVANCED MATERIALS SCIENCE, 2018, 53 (02) :147-160
[5]   Recent Progress in Transient Liquid Phase and Wire Bonding Technologies for Power Electronics [J].
Kang, Hyejun ;
Sharma, Ashutosh ;
Jung, Jae Pil .
METALS, 2020, 10 (07) :1-21
[6]   Recent Advances and Trends in Chiplet Design and Heterogeneous Integration Packaging [J].
Lau, John H. .
JOURNAL OF ELECTRONIC PACKAGING, 2024, 146 (01)
[7]   Suitable Thicknesses of Base Metal and Interlayer, and Evolution of Phases for Ag/Sn/Ag Transient liquid-phase Joints Used for Power Die Attachment [J].
Li, J. F. ;
Agyakwa, P. A. ;
Johnson, C. M. .
JOURNAL OF ELECTRONIC MATERIALS, 2014, 43 (04) :983-995
[8]   Interfacial reaction in Cu/Sn/Cu system during the transient liquid phase soldering process [J].
Li, J. F. ;
Agyakwa, P. A. ;
Johnson, C. M. .
ACTA MATERIALIA, 2011, 59 (03) :1198-1211
[9]   Kinetics of Ag3Sn growth in Ag-Sn-Ag system during transient liquid phase soldering process [J].
Li, J. F. ;
Agyakwa, P. A. ;
Johnson, C. M. .
ACTA MATERIALIA, 2010, 58 (09) :3429-3443
[10]   The adsorption of Ag3Sn nano-particles on Cu-Sn intermetallic compounds of Sn-3Ag-0.5Cu/Cu during soldering [J].
Liu, Xiaoying ;
Huang, Mingliang ;
Zhao, Yanhui ;
Wu, C. M. L. ;
Wang, Lai .
JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 492 (1-2) :433-438