Fusion of improved RRT and ant colony optimization for robot path planning

4.0 of Abstract Suboxide chalcogenide thin fi lms like TeOx are promising inorganic lithography materials. Different from previous reports of single-mode lithography based on TeOx fi lms at low laser power, this study proposes multimodal lithography effects at low, medium, and high laser power ranges. The TeOx fi lms were fabricated by reactive magnetron sputtering, exhibiting super smooth surface with an RMS 0.33 nm. The lithographic performance was researched using a laser direct writing system with a wavelength of 780 nm. The experiment results showed that different kind of lithographic patterns were achieved by changing laser power ranges. At low exposure powers ( 5 mW to 9 mW), TeOx fi lm transforms from amorphous to crystalline, generating patterns with single-trench since only the crystalline state dissolves in alkaline developers. At medium exposure powers ( 10 mW to 15 mW), the center of the laser spot that has greater power turns the fi lm from amorphous to crystalline and then