Forming and Resistive Switching of HfO2-Based RRAM Devices at Cryogenic Temperature

被引:0
作者
Quesada, Emilio Perez-Bosch [1 ]
Mistroni, Alberto [1 ]
Jia, Ruolan [2 ]
Reddy, Keerthi Dorai Swamy [1 ]
Reichmann, Felix [1 ]
Castan, Helena [3 ]
Duenas, Salvador [3 ]
Wenger, Christian [1 ,4 ]
Perez, Eduardo [1 ,4 ]
机构
[1] IHP Leibniz Inst Innovat Mikroelekt, D-15230 Frankfurt, Oder, Germany
[2] Tech Univ Munich, Chair Micro & Nanosyst Technol, D-85748 Munich, Germany
[3] Univ Valladolid, Dept Elect, Valladolid 47011, Spain
[4] BTU Cottbus Senftenberg, Fac MINT Math Comp Sci Phys Elect Engn & Informat, D-03046 Cottbus, Germany
关键词
1T1R; CMOS; cryogenic temperatures; HfO2; resistive switching; RRAM; MEMORY;
D O I
10.1109/LED.2024.3485873
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Reliable data storage technologies able to operate at cryogenic temperatures are critical to implement scalable quantum computers and develop deep-space exploration systems, among other applications. Their scarce availability is pushing towards the development of emerging memories that can perform such storage in a non-volatile fashion. Resistive Random-Access Memories (RRAM) have demonstrated their switching capabilities down to 4 K. However, their operability at lower temperatures still remain as a challenge. In this work, we demonstrate for the first time the forming and resistive switching capabilities of CMOS-compatible RRAM devices at 1.4 K. The HfO2-based devices are deployed following an array of 1-transistor-1-resistor (1T1R) cells. Their switching performance at 1.4K was also tested in the multilevel-cell (MLC) approach, storing up to 4 resistance levels per cell.
引用
收藏
页码:2391 / 2394
页数:4
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