Low-Temperature and Low-Pressure Fine-Pitch Micro Cu Bump Bonding Using Stress Migration of a Sputtering Ag Layer
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Zhang, Zheng
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Institute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, JapanInstitute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, Japan
Zhang, Zheng
[1
]
Suetake, Aiji
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Institute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, JapanInstitute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, Japan
Suetake, Aiji
[1
]
Liu, Ran
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Institute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, JapanInstitute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, Japan
Liu, Ran
[1
]
Yoshida, Hiroshi
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Institute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, JapanInstitute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, Japan
Yoshida, Hiroshi
[1
]
Okumura, Rieko
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Institute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, JapanInstitute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, Japan
Okumura, Rieko
[1
]
Chen, Chuantong
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Institute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, JapanInstitute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, Japan
Chen, Chuantong
[1
]
Suganuma, Katsuaki
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Institute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, JapanInstitute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, Japan
Suganuma, Katsuaki
[1
]
机构:
[1] Institute Of Scientific And Industrial Research (SANKEN), Osaka University, Osaka,567-0047, Japan
来源:
2024 International Conference on Electronics Packaging, ICEP 2024
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2024年
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摘要:
Chemical bonds - Grain growth - Integrated circuit interconnects - Sputtering - Temperature