Low-frequency noise analysis on asymmetric damage and self-recovery behaviors of ZnSnO thin-film transistors under hot carrier stress

被引:0
作者
Shin, Wonjun [1 ,2 ]
Lee, Ji Ye [3 ]
Kim, Jangsaeng [2 ]
Lee, Sang Yeol [4 ]
Lee, Sung-Tae [5 ]
机构
[1] Sungkyunkwan Univ, Dept Semicond Convergence Engn, Suwon 16419, South Korea
[2] Seoul Natl Univ, Interuniv Semicond Res Ctr, Dept Elect & Comp Engn, Seoul 08826, South Korea
[3] Korea Univ, Dept Elect Engn, Seoul 02841, South Korea
[4] Gachon Univ, Elect Engn Dept, Seongnam 13110, South Korea
[5] Hongik Univ, Sch Elect & Elect Engn, Seoul 04066, South Korea
基金
新加坡国家研究基金会;
关键词
Zinc tin oxide (ZTO); Low-frequency noise (LFN); Hot carrier stress (HCS); Subgap density of states; DEFECTS; TFTS; GATE;
D O I
10.1186/s11671-024-04081-x
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The need for understanding the low-frequency noise (LFN) of metal oxide semiconductor thin-film transistors (TFTs) is increasing owing to the substantial effects of LFN in various circuit applications. A focal point of inquiry pertains to the examination of LFN amidst bias stress conditions, known to compromise TFT reliability. In this study, we investigate the effects of hot carrier stress (HCS) on zinc tin oxide (ZTO) TFTs by low-frequency noise (LFN) analysis. Asymmetric damage caused by HCS is analyzed by measuring the power spectral density at the source and drain sides. The excess noise generated by the HCS is analyzed with consideration of trap density of states (DOS). It is revealed that the needle defects are generated during the HCS, significantly affecting the LFN characteristics of the ZTO TFTs. Additionally, we observe a self-recovery behavior in the devices and demonstrate the relevant changes in the LFN characteristics following this phenomenon. This study provides valuable insights into the LFN characteristics of ZTO TFTs under HCS conditions and sheds light on the underlying mechanisms.
引用
收藏
页数:8
相关论文
共 27 条
[1]   Low-frequency excess noise induced by hot-carrier injection in polysilicon thin-film transistors [J].
Bove, A ;
Giovannini, S ;
Valetta, A ;
Mariucci, L ;
Pecora, A ;
Fortunato, G .
THIN SOLID FILMS, 2001, 383 (1-2) :147-150
[2]   1/f Noise and Defects in Microelectronic Materials and Devices [J].
Fleetwood, D. M. .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2015, 62 (04) :1462-1486
[3]   Analytical Physical-Based Drain-Current Model of Amorphous InGaZnO TFTs Accounting for Both Non-Degenerate and Degenerate Conduction [J].
Ghittorelli, Matteo ;
Torricelli, Fabrizio ;
Kovacs-Vajna, Zsolt Miklos .
IEEE ELECTRON DEVICE LETTERS, 2015, 36 (12) :1340-1343
[4]   Effects of defect creation on bidirectional behavior with hump characteristics of InGaZnO TFTs under bias and thermal stress [J].
Im, Hwarim ;
Song, Hyunsoo ;
Jeong, Jaewook ;
Hong, Yewon ;
Hong, Yongtaek .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (03) :03CB03
[5]   Effects of film thickness and Sn concentration on electrical properties of solution-processed zinc tin oxide thin film transistors [J].
Kim, CheolGyu ;
Lee, Nam-Hyun ;
Kwon, Young-Kyu ;
Kang, Bongkoo .
THIN SOLID FILMS, 2013, 544 :129-133
[6]   Extraction Technique for the Conduction Band Minimum Energy in Amorphous Indium-Gallium-Zinc-Oxide Thin Film Transistors [J].
Kim, Haesung ;
Yoo, Han Bin ;
Lee, Heesung ;
Ryu, Ji Hee ;
Park, Ju Young ;
Han, Seung Hyeop ;
Yang, Hyojin ;
Bae, Jong-Ho ;
Choi, Sung-Jin ;
Kim, Dae Hwan ;
Kim, Dong Myong .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2023, 70 (06) :3126-3130
[7]   Analysis of Threshold Voltage Shift for Full VGS/VDS/Oxygen-Content Span under Positive Bias Stress in Bottom-Gate Amorphous InGaZnO Thin-Film Transistors [J].
Kim, Je-Hyuk ;
Jang, Jun Tae ;
Bae, Jong-Ho ;
Choi, Sung-Jin ;
Kim, Dong Myong ;
Kim, Changwook ;
Kim, Yoon ;
Kim, Dae Hwan .
MICROMACHINES, 2021, 12 (03)
[8]   Relation Between Low-Frequency Noise and Subgap Density of States in Amorphous InGaZnO Thin-Film Transistors [J].
Kim, Sungchul ;
Jeon, Yongwoo ;
Lee, Je-Hun ;
Ahn, Byung Du ;
Park, Sei Yong ;
Park, Jun-Hyun ;
Kim, Joo Han ;
Park, Jaewoo ;
Kim, Dong Myong ;
Kim, Dae Hwan .
IEEE ELECTRON DEVICE LETTERS, 2010, 31 (11) :1236-1238
[9]   Structural and electronic properties with respect to Si doping in oxygen rich ZnSnO amorphous oxide semiconductor [J].
Lee, Byeong Hyeon ;
Park, Jingyu ;
Kumar, Akash ;
Choi, Sungju ;
Kim, Dae Hwan ;
Lee, Sang Yeol .
MATERIALS TODAY COMMUNICATIONS, 2022, 33
[10]   Solution-Processed ZTO TFTs With Recessed Gate and Low Operating Voltage [J].
Lee, Chen-Guan ;
Dutta, Soumya ;
Dodabalapur, Ananth .
IEEE ELECTRON DEVICE LETTERS, 2010, 31 (12) :1410-1412