Total Ionizing Dose Effects on DC/RF Performances of Emerging Vertical Back-Gate CMOS Platform

被引:0
作者
Ma, Yue [1 ,2 ]
Bi, Jinshun [2 ,3 ]
Zhao, Biyao [1 ,2 ]
Fan, Linjie [1 ,2 ]
Wang, Jianjian [1 ,2 ]
Yan, Gangping [1 ,2 ]
Xu, Ziming [1 ,2 ]
Chen, Baihong [1 ,2 ]
Deng, Hanying [1 ,2 ]
Li, Zhiqiang [1 ,2 ]
Stempitsky, Viktor [4 ]
机构
[1] Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R China
[2] Univ Chinese Acad Sci, Sch Integrated Circuits, Beijing 100049, Peoples R China
[3] Guizhou Normal Univ, Sch Integrated Circuits, Guiyang 550025, Guizhou, Peoples R China
[4] Belarusian State Univ Informat & Radioelect, Dept Microelect, Minsk 220013, BELARUS
基金
中国国家自然科学基金;
关键词
MOSFET; Radio frequency; Logic gates; Mathematical models; Silicon; Semiconductor device modeling; Resistance; Metals; Lithography; Performance evaluation; High integration-density inverter; radio frequency (RF); technology computer aided design (TCAD); total ionizing dose (TID); vertical back-gate complementary metal-oxide-semiconductor (VBG CMOS); DEVICES;
D O I
10.1109/TDMR.2024.3488750
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
As the scaling down of the silicon (Si)-based transistors is reaching its physical limits, the vertical-structure complementary metal-oxide-semiconductor (VCMOS) process has emerged as a promising technology due its comparative advantages, in terms of aggressive scalability. Along these lines, in this work, an emerging nano-scale vertical back-gate (VBG) CMOS platform with gate length depending on the deposition process instead of the accuracy of the lithography process was proposed. In addition, the total ionizing dose (TID) effects on both the direct current and radio frequency characteristics of the proposed VBG MOSFETs were investigated by performing technology computer aided design (TCAD) simulations. Besides, a high integration-density inverter was implemented by the VBG CMOS platform as well. Both the DC and transient performances of the proposed inverter under TID effects were also characterized. From the simulated results it was demonstrated that although the VBG CMOS platform has the potential to be applied in digital integrated circuits (ICs) and RF ICs, the sensitivity to TID is still a problem to be mitigated. This work provides valuable guidelines for the TID-hardened design of VBG MOSFETs and circuits.
引用
收藏
页码:637 / 645
页数:9
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