Formation of Diamond-Like Carbon Films by the Plasma-Chemical Decomposition of Hydrocarbons

被引：0
作者：
Povolotskiy, A. V. [1 ]
Smirnov, E. V. [1 ]
Tver'yanovich, Yu. S. [1 ]
机构：
[1] St Petersburg State Univ, Inst Chem, St Petersburg 198504, Russia
来源：
GLASS PHYSICS AND CHEMISTRY | 2024年 / 50卷 / 03期
基金：
俄罗斯科学基金会;
关键词：
plasma-chemical decomposition; hydrocarbons; diamond-like film; microhardness; COATINGS;
D O I：
10.1134/S1087659624600728
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The process of the formation of diamond-like carbon films on the surface of monocrystalline silicon is studied. The film is formed as a result of the plasma-chemical decomposition of hydrocarbons (propane, butane) and subsequent annealing in a vacuum. The carbon film is formed in the form of diamond-like nanoparticles with a diameter of about 8 nm. Silicon-carbon bonds are formed at the boundary of the silicon substrate and the carbon film, which ensures strong adhesion.
引用
收藏
页码：222 / 226
页数：5
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