共 32 条
Fabrication of Composite Thin-Film Strain Gauge on Flexspline by Photoresist Stencil Lithography
被引:1
作者:
Zhao, Yang
[1
,2
]
Wang, Wenxuan
[1
]
Zhang, Sijie
[1
]
Liu, Jin
[1
]
Ying, Yuhuang
[1
]
Chen, Hongyu
[1
]
Hai, Zhenyin
[3
]
Sun, Daoheng
[1
]
机构:
[1] Xiamen Univ, Pen Tung Sah Inst Micronano Sci & Technol, Xiamen 361102, Peoples R China
[2] Xiamen Univ, Dept Shenzhen Res Inst, Shenzhen 518000, Peoples R China
[3] Xiamen Univ, Sch Aerosp Engn, Xiamen 361102, Peoples R China
关键词:
Temperature sensors;
Sensors;
Temperature measurement;
Resistance;
Strain;
Harmonic analysis;
Thermal stability;
Curved surface;
harmonic reducer flexspline;
photoresist stencil lithography;
thin-film strain gauge (TFSG);
TEMPERATURE;
JOINT;
D O I:
10.1109/JSEN.2024.3421999
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
The harmonic reducer is a core component of industrial robots, and the design of thin-film strain gauge (TFSG) for in situ monitoring of the strain state of the harmonic reducer is crucial for the operational accuracy and reliability of industrial robots. However, the current methods for fabricating TFSG primarily rely on planar lithography and thin-film deposition techniques. These techniques have limitations when it comes to creating miniature TFSG on nonplanar rough surfaces. In addition, metallic materials commonly used for TFSG have a large temperature coefficient of resistance (TCR), which affects the applicability of in situ preparation of sensors on harmonic reducers. Here, a fabrication of copper-nickel alloy-nickel-chromium alloy (CuNi-NiCr) composite TFSG by photoresist stencil lithography is reported. The sensing performance of the TFSG was evaluated at room temperature. The gauge factors (GFs) of the TFSG were calibrated to 2.23 at room temperature and a TCR of 5.2 ppm/degrees C at 10 degree celsius- 60 degree celsius. In addition, its excellent durability was confirmed by performing cyclic strain tests. Finally, CuNi-NiCr composite TFSG was fabricated on a harmonic reducer flexspline and experimentally tested to successfully acquire the strain conditions that the harmonic reducer is subjected to during normal operation. This approach provides feasibility in the preparation of nondestructive, small-disturbance, and in situ surface strain-monitoring components in nonplanar surfaces.
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页码:25439 / 25447
页数:9
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