High-Precision Measurement Method for Small Angles Based on the Defect Spot Mode of the Position-Sensitive Detector

被引：0

作者：

Zhai, Yusheng ^{[1
]}

Wang, Guorong ^{[1
]}

Zhao, Yiheng ^{[1
]}

Wu, Rongxin ^{[1
]}

Zhang, Lin ^{[2
]}

Su, Zhan ^{[3
]}

Zhang, Zhifeng ^{[1
]}

Yang, Peng ^{[1
]}

Zhang, Ruiliang ^{[1
]}

机构：

[1] Zhengzhou Univ Light Ind, Sch Elect & Informat, Zhengzhou 450000, Peoples R China

[2] White Pigeon Abras Tools Co Ltd, Zhengzhou 450000, Peoples R China

[3] Henan Acad Sci Inst Appl Phys Co Ltd, Zhengzhou 450000, Peoples R China

来源：

SENSORS | 2024年 / 24卷 / 22期

基金：

中国国家自然科学基金;

关键词：

photoelectric technology; angle measurement; PSD; defect spot working mode; LASER AUTOCOLLIMATION; SYSTEM;

D O I：

10.3390/s24227120

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The paper proposes and verifies a small-angle measurement method based on the defect spot mode of the position-sensitive detector (PSD). With the output characteristics of the PSD in the defect spot mode and the size transformation properties of a focused beam, the measurement sensitivity can be significantly improved. Calibration experiments with the piezoelectric transducer (PZT) indicate that compared with the current PSD-based autocollimation method, the proposed method can improve the sensitivity of small-angle measurement by 57 times, and the measurement sensitivity of the proposed method can be further improved by optimizing the system parameters, while the proposed method has the advantages of a simple system and high real-time performance. Therefore, the proposed method is expected to be used in high-precision motion error detection, as well as in shape and position measurement.

引用

页数：12