Spatial resolution limit for a solid immersion lens

The solid immersion (SI) effect is widely used to increase the spatial resolution of optical focusing systems and even overcome the Abbe diffraction limit. Resolution enhancement offered by a SI lens is mostly a function of its geometry and refractive index nSI. While SI lenses are relatively well understood, the scaling of the resolution enhancement by such lenses is still a subject of debate, with some works reporting <^>nSI and <^>n2SI dependencies for the hemispherical and hyperhemispherical SI lens configurations, respectively. In this paper, we offer a general argument for a resolution limit for SI optics and, then, verify it via the numerical analysis of the hemispherical and hyperhemispherical silicon SI lenses designed for the terahertz (THz) range. In fact, we find that there is no contradiction in the reported resolution enhancements <^>nSI and <^>n2SI; however, they happen in different operation regimes. We then demonstrate that the resolution values reported for the different SI lens arrangements in the visible (VIS), near-, and middle-infrared (NIR and MIR), as well as THz bands obey the derived limit. Our findings will be useful for the further design and applications of SI optics. (c) 2024 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.