Development of heater and basic deposition of YBCO superconducting thin film using the pulsed laser deposition method

Various thin film deposition methods such as RCE-DR (Reactive Co-Evaporation by Deposition and Reaction), MOD(Metal Organic Deposition), MOCVD(Metal Organic Chemical Vapor Deposition) and PLD(Pulsed Laser Deposition) have been used to fabricate 2G HTS (Second-Generation High-Temperature Superconducting) tapes. Especially, 2G HTS tapes fabricated by the PLD process show excellent electrical current conduction properties under high magnetic field and have recently become a popular research field worldwide. In this study, we have examined the substrate heating temperature, oxygen partial pressure, and pulsed laser conditions in vacuum, which are essential conditions for manufacturing 2G HTS tapes by pulsed laser process. we have optimized conditions for the continuous deposition of YBCO (YBa2Cu3O7-delta) superconducting layers using the reel-to-reel method on substrates coated with functional layers. The fabricated tapes were evaluated for their characteristics by analyzing biaxial alignment properties using XRD for 2-theta, in-plane texture, and out-of-plane texture and critical current measurement using the Hall-Ic method.