Leakage current reduction of poly-Si thin film transistors by two-step annealing

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[1] Aoyama, Takashi
[2] Mochizuki, Yasuhiro
[3] Kawachi, Genshiro
[4] Oikawa, Saburo
[5] Miyata, Kenji
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Aoyama, Takashi | 1600年 / 30期
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