Lithographic projectors with dark-field illumination

被引：0
|
作者：
White, D.L.
Cirelli, R.A.
Spector, S.J.
Wood, II, O.R.
机构：
来源：
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | / 17卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：3301 / 3305
相关论文
共 50 条
  • [21] Impact of vessel diameter and bandwidth of illumination in sidestream dark-field oximetry
    Kurata, Tomohiro
    Li, Zhenguang
    Oda, Shigeto
    Kawahira, Hiroshi
    Haneishi, Hideaki
    BIOMEDICAL OPTICS EXPRESS, 2015, 6 (05): : 1616 - 1631
  • [22] Objective-type dark-field illumination for scattering from microbeads
    Braslavsky, I
    Amit, R
    Ali, BMJ
    Gileadi, O
    Oppenheim, A
    Stavans, J
    APPLIED OPTICS, 2001, 40 (31) : 5650 - 5657
  • [23] Edge-Illumination X-Ray Dark-Field Tomography
    Doherty, Adam
    Savvidis, Savvas
    Navarrete-Leon, Carlos
    Olivo, Alessandro
    Endrizzi, Marco
    Gerli, Mattia F. M.
    PHYSICAL REVIEW APPLIED, 2023, 19 (05)
  • [24] Optical Chirality from Dark-Field Illumination of Planar Plasmonic Nanostructures
    Hwang, Yongsop
    Hopkins, Ben
    Wang, Dapeng
    Mitchell, Arnan
    Davis, Timothy J.
    Lin, Jiao
    Yuan, Xiao-Cong
    LASER & PHOTONICS REVIEWS, 2017, 11 (06)
  • [25] Agglutination technics and value of dark-field illumination for the studies of anaerobic organisms
    Plaut, HC
    DEUTSCHE MEDIZINISCHE WOCHENSCHRIFT, 1917, 43 (1-26) : 302 - 302
  • [26] A MICROSCOPIC FILM OF THE MOVEMENTS OF BULL SPERM CELLS IN DARK-FIELD ILLUMINATION
    RIKMENSPOEL, R
    VANHERPEN, G
    EXPERIENTIA, 1956, 12 (04): : 160 - 161
  • [27] Dark-field digital holographic microscopy by using vortex beam illumination
    Zhao Ying-Chun
    Zhang Xiu-Ying
    Yuan Cao-Jin
    Nie Shou-Ping
    Zhu Zhu-Qing
    Wang Lin
    Li Yang
    Gong Li-Ping
    Feng Shao-Tong
    ACTA PHYSICA SINICA, 2014, 63 (22)
  • [28] Coating geometry measurement of specialty fiber with dark-field illumination technique
    Park, Gaye
    Lee, Junho
    Jung, Derek Minwoo
    Kong, Byung Joo
    Moon, Dae Seung
    Jung, Chang Hyun
    Shin, Woojin
    Kim, Jaesun
    Ouh, Chihwan
    OPTICAL COMPONENTS AND MATERIALS XVI, 2019, 10914
  • [29] Laser Dark-Field Illumination System Modeling for Semiconductor Inspection Applications
    Zhou, Wei
    Hart, Darcy
    Roy, Rajiv
    ILLUMINATION OPTICS II, 2011, 8170
  • [30] Sub-Rayleigh dark-field imaging via speckle illumination
    Dou, Ling-Yu
    Cao, De-Zhong
    Gao, Lu
    Song, Xin-Bing
    OPTICS LETTERS, 2023, 48 (06) : 1347 - 1350
12345