Effect of the surface condition on the internal stress of a-Si:H, a-SiNx:H, and a-Si:H/a-SiNx:H heterojunction films

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[1] Wang, Wanlu
[2] Liao, Kejun
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Wang, Wanlu | 1600年 / 119期
关键词：
Amorphous Hydrogenated Silicon - Internal Stress - Moist Air - Surface Condition;
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