Simultaneous length and angle measurement with a plane mirror interferometer

被引：0
|
作者：
Wang, Yung Cheng [1 ]
Manske, Eberhard [1 ]
Jäger, Gerd [1 ]
机构：
[1] Technische Universität Ilmenau, Fakultät für Maschinenbau, Inst. Prozessmess- und Sensortechnik, Max-Planck-Ring 12, D-98693 Ilmenau, Germany
来源：
Technisches Messen | 2001年 / 68卷 / 07期
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学科分类号：
摘要：
10
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页码：319 / 325
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