Sulfide-assisted reordering at the InP surface and SiNx/InP interface

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Kwok, R.W.M.
Jin, G.
So, B.K.L.
Hui, K.C.
Huang, L.
Lau, W.M.
Hsu, C.C.
Landheer, D.
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 1995年 / 13卷 / 3 pt 1期
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