This paper deals with the determination of the interface density of states in amorphous silicon-based multilayers. Photothermal deflection spectroscopy is used to characterize two series of a-Si:H/ a-Si1-xCx:H multilayers, and a new approach in the treatment of experimental data is used in order to obtain accurate results. From this approach, an upper limit of 1010 cm-2 is determined for the interface density of states.