HIGH-VOLTAGE ISOLATOR FOR GAS FEED LINE.

被引：0
|
作者：
Harper, J.M.E.
Kaufman, H.R.
Waters, G.A.
机构：
来源：
IBM technical disclosure bulletin | 1984年 / 27卷 / 4 B期
关键词：
WAVEGUIDE COMPONENTS - Isolators;
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摘要：
A compact, modular voltage isolator design is provided that can easily be incorporated into a gas feed line to a high-voltage device, such as a plasma or ion apparatus. This high-voltage capability is provided in a compact size by the use of multiple segments in series, with the segments separated by de-ionizing screens. This design offers reduced contamination of the gas as well as reduced shock hazard.
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页码：2513 / 2515
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