Effect of gas-phase additives C2H4, C2H6, and C2H6 on SiH4/O2 chemical vapor deposition

被引：0
|
作者：
Univ of Tokyo, Tokyo, Japan [1 ]
机构：
来源：
J Electrochem Soc | / 4卷 / 1355-1361期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] DISSOCIATIVE IONIZATION OF C2H2, C2H4, AND C2H6 PRODUCED BY ION-BOMBARDMENT
    EDWARDS, AK
    STEUER, MF
    WOOD, RM
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (09): : 1108 - 1108
  • [22] Electron swarm parameters in C2H2, C2H4 and C2H6: measurements and kinetic calculations
    Pinhao, N. R.
    Loffhagen, D.
    Vass, M.
    Hartmann, P.
    Korolov, I
    Dujko, S.
    Bosnjakovic, D.
    Donko, Z.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2020, 29 (04):
  • [23] Ammonia Modification on UTSA-280 for C2H4/C2H6 Separation
    Chen Yang
    Du Yadan
    Wang Yong
    Liu Puxu
    Li Libo
    Li Jinping
    ACTA CHIMICA SINICA, 2020, 78 (06) : 534 - 539
  • [24] Crystalline porous materials as a versatile platform for C2H4/C2H6 separation
    Lin, Xuan
    Yang, Yisi
    Wang, Xue
    Lin, Si
    Bao, Zongbi
    Zhang, Zhangjing
    Xiang, Shengchang
    Separation and Purification Technology, 2024, 330
  • [25] EFFECT OF ADDED AMMONIA ON REACTIONS OF ACTIVE NITROGEN WITH CH4, C2H6, AND C2H4
    WRIGHT, AN
    WINKLER, CA
    CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE, 1962, 40 (07): : 1291 - &
  • [26] AN XPS INVESTIGATION OF THE INTERACTION OF CH4, C2H2, C2H4 AND C2H6 WITH A BARIUM SURFACE
    VERHOEVEN, JAT
    VANDOVEREN, H
    SURFACE SCIENCE, 1982, 123 (2-3) : 369 - 383
  • [27] 13C NMR analysis of C2H6+C2H4+THF mixed hydrate for an application to separation of C2H4 and C2H6
    Park, Jeasung
    Kang, Seong-Pil
    Lee, Jong-Won
    KOREAN JOURNAL OF CHEMICAL ENGINEERING, 2016, 33 (07) : 2186 - 2190
  • [28] On the equilibrium and the heat of the reaction C2H4+H-2=C2H6
    Teller, E
    Topley, B
    JOURNAL OF THE CHEMICAL SOCIETY, 1935, : 876 - 885
  • [29] 13C NMR analysis of C2H6+C2H4+THF mixed hydrate for an application to separation of C2H4 and C2H6
    Jeasung Park
    Seong-Pil Kang
    Jong-Won Lee
    Korean Journal of Chemical Engineering, 2016, 33 : 2186 - 2190
  • [30] Molecular insights into the role of O2 in reversed C2H6/C2H4 separation on metal-organic frameworks
    Wang, Ruihan
    Gao, Qiang
    Zhong, Yeshuang
    Wang, Xin
    Xu, Dingguo
    SEPARATION AND PURIFICATION TECHNOLOGY, 2023, 304
12345