Fabrication of YBaCuO-Josephson-junctions on MgO-substrates damaged by a focused ion beam prior to film deposition

被引:0
作者
Neumann, Christian [1 ]
Suzuki, Katsumi [1 ]
Enomoto, Youichi [1 ]
Tanaka, Shoji [1 ]
机构
[1] Int Superconducting Technology Cent, Tokyo, Japan
来源
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 5 B期
关键词
Beam positioning - Focused ion beam - Grain boundary junction - Josephson junctions - Step edge junction - YBCO film;
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页码:727 / 729
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