ELECTRON UNDULATING RING DEDICATED TO VLSI LITHOGRAPHY.

被引：0
|
作者：
Tomimasu, Takio [1 ]
机构：
[1] Electrotechnical Lab, Sakura-mura, Jpn, Electrotechnical Lab, Sakura-mura, Jpn
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1987年 / 26卷 / 05期
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摘要：
ACCELERATORS, SYNCHROTRON
引用
收藏
页码：741 / 746
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