Ion energy dependence of inter-atomic bonding state of carbon films deposited by low-energy carbon-negative ion beam

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作者：
Tsuji, Hiroshi [1 ]
Nakamura, Syuichi [1 ]
Yoshihara, Takaaki [1 ]
Gotoh, Yasuhito [1 ]
Ishikawa, Junzo [1 ]
机构：
[1] Dept. of Electron. Sci. and Eng., Kyoto University, Yoshida-honmachi, Sakyo-ku, 606-8501 Kyoto, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 1999年 / 42卷 / 03期
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页码：221 / 224
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