Thickness Effect of Fluorescent Screen on Energy Resolution of Parallel Detection EELS for an UHVEM

被引：0

作者：

Yoshida, Kiyokazu ^{[1
]}

Takaoka, Akio ^{[2
]}

Ura, Katsumi ^{[2
]}

Fujita, Hiroshi ^{[1
]}

机构：

[1] Research Center for Uhvem, Osaka University, Yamada-Oka, Suita,565, Japan

[2] Faculty of Engineering, Osaka University, Yamada-Oka, Suita,565, Japan

来源：

Microscopy | 1988年 / 37卷 / 05期

关键词：

Electron beams - Fluorescence - Yttrium aluminum garnet;

D O I：

10.1093/oxfordjournals.jmicro.a050692

中图分类号：

学科分类号：

摘要：

In the parallel detection system for EELS, the energy resolution of spectra depends on the characteristics of the fluorescent screen which converts the electron spectrum into the photon signal. We tested the various kinds of screens made by fluorescent powders or a YAG single crystal, and measured their luminous region as a function of the screen thickness with the 500 kV electron beam. When the screen is thicker than 70–80 μm, the FWHM is proportional to the thickness. However, there is a certain saturation value (∼55 μm) of luminous width for the thin screens, and this value is larger than the electron beam size. © Oxford University Press.

引用

页码：229 / 231

共 17 条

[1] THICKNESS EFFECT OF FLUORESCENT SCREEN ON ENERGY RESOLUTION OF PARALLEL DETECTION EELS FOR AN UHVEM
YOSHIDA, K
TAKAOKA, A
URA, K
FUJITA, H
JOURNAL OF ELECTRON MICROSCOPY, 1988, 37 (05): : 229 - 231
[2] HIGH SPATIAL-RESOLUTION SCINTILLATOR FOR PARALLEL DETECTION EELS IN UHVEM
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