Laser ablation deposition of silicon nanostructures

被引:0
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作者
Levoska, J. [1 ]
Tyunina, M. [2 ]
Leppävuori, S. [1 ]
机构
[1] Microelectron. and Mat. Phys. Labs., EMPART Res. Group of Infotech Oulu, University of Oulu, PL 444, FIN-90571 Oulu, Finland
[2] Institute of Solid State Physics, University of Latvia, Riga, Latvia
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Nanostructured Materials | 1999年 / 12卷 / 01期
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页码:101 / 106
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