Organic/inorganic thin films deposited from diethoxydimethylsilane by plasma enhanced chemical vapor deposition

被引：0
|
作者：
Roualdes, Stéphanie [1 ]
Hovnanian, Nadine [1 ]
Van Der Lee, Arie [1 ]
Berjoan, Rene [2 ]
Durand, Jean [1 ]
机构：
[1] Lab. Mat. Procedes Membranaires (U., ENSCM, 8, R. l'Ecl. Normale, 34296, Montpellier cedex 5, France
[2] Inst. Sci. Genie Mat. et Procedes, CNRS, B.P 5 Odeillo, 66125, Font-Romeu, France
来源：
Journal of Non-Crystalline Solids | 1999年 / 248卷 / 02期
关键词：
Number:; -; Acronym:; CNRS; Sponsor: Centre National de la Recherche Scientifique;
D O I：
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摘要：
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页码：235 / 246
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