SIMULTANEOUS AES AND SIMS DEPTH PROFILING OF STANDARD Ta2O5 FILMS.

被引：0
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作者：
Mathieu, H.J. [1 ]
Landolt, D. [1 ]
机构：
[1] Ecole Polytechnique Federale de, Lausanne, Lausanne, Switz, Ecole Polytechnique Federale de Lausanne, Lausanne, Switz
来源：
Surface and Interface Analysis | 1986年 / 11卷 / 1-2期
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摘要：
15
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页码：88 / 93
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