CHARACTERISTICS OF CLEANING AND CARBONIZING PLASMAS IN TEXTOR.

被引：0

作者：

Amemiya, Hiroshi ^{[1
]}

Ishii, Shigeyuki ^{[1
]}

Oyama, Hitoshi ^{[1
]}

Sakamoto, Yuichi ^{[1
]}

Minagawa, Hideki ^{[1
]}

Satake, Tohru ^{[1
]}

Hashiba, Masao ^{[1
]}

Yamashina, Toshiro ^{[1
]}

Noda, Nobuaki ^{[1
]}

Hori, Yoichiro ^{[1
]}

Akaishi, Kenya ^{[1
]}

Miyahara, Akira ^{[1
]}

Banno, Tatsuya ^{[1
]}

Winter, Joerg ^{[1
]}

Hoethker, Klaus ^{[1
]}

机构：

[1] Inst of Physical & Chemical, Research, Wako, Jpn, Inst of Physical & Chemical Research, Wako, Jpn

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1987年 / 26卷 / 09期

关键词：

GLOW DISCHARGES - PLASMAS - Cleaning;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Plasma parameters for discharge cleaning and carbonization in TEXTOR (Torus Experiment on Technology Oriented Research in the Kernforschungsanlage Juelich) have been measured with Langmuir probes. Results for a rf-assisted glow (RG) discharge of hydrogen and an electron cyclotron resonance (ECR) discharge are presented. The flux of ions and neutral atoms are estimated from measured parameters. In RG(H//2), both H//2** plus and H are effective for cleaning. In ECR, an appreciable flux of H is obtained, and the H//2** plus flux, though reduced by the radial magnetic field, has an effect of cleaning. In RG(CH//4/D//2), the positive ion flux of the order of 6 multiplied by 10**1**3 cm** minus **2s** minus **1 is responsible for the carbonization.

引用

页码：1534 / 1543