Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection

被引：0
|
作者：
Higurashi, Eiji [1 ]
Sawada, Renshi [1 ]
Ito, Takahiro [1 ]
机构：
[1] NTT Opto-electronics Laboratories, 3-9-11 Midori-cho, Musashino-shi, Tokyo 180-8585, Japan
来源：
Applied Optics | 1999年 / 38卷 / 2-9期
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页码：1746 / 1751
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