Bernas ion source modifications for platinum and aluminum ion implantation

被引：0
作者：
Medulla, C.
Raspagliesi, M.
机构：
来源：
Review of Scientific Instruments | 1998年 / 69卷 / 2 pt 2期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
[41]   Modification of surface mechanical properties of aluminum by high current Mo ion implantation using a MEVVA ion source [J].
Miao, W ;
Liu, XT ;
Tao, K .
SURFACE & COATINGS TECHNOLOGY, 2005, 191 (01) :33-37
[42]   POSSIBILITY OF USING A SOURCE OF BERNAS-NIER TYPE FOR NEGATIVE-ION PRODUCTION [J].
DENIMAL, J ;
RICAUD, C .
NUCLEAR INSTRUMENTS & METHODS, 1973, 109 (02) :409-409
[43]   Negative Hydrogen Ion Beam Extraction from an AC Heated Cathode Driven Bernas-Type Ion Source [J].
Okano, Y. ;
Miyamoto, N. ;
Kasuya, T. ;
Wada, M. .
FOURTH INTERNATIONAL SYMPOSIUM ON NEGATIVE IONS, BEAMS AND SOURCES (NIBS 2014), 2015, 1655
[44]   Upgraded vacuum arc ion source for metal ion implantation [J].
Nikolaev, A. G. ;
Oks, E. M. ;
Savkin, K. P. ;
Yushkov, G. Yu. ;
Brown, I. G. .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (02)
[45]   BROAD BEAM ION-SOURCE FOR ION-IMPLANTATION [J].
FENG, YC ;
TIAN, F .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) :318-320
[46]   A LASER ION-SOURCE FOR ION-IMPLANTATION APPLICATIONS [J].
SURI, BM ;
AMES, F ;
KLUGE, HJ ;
SCHEERER, F ;
TRAUTMANN, N .
INSTITUTE OF PHYSICS CONFERENCE SERIES, 1991, (114) :125-128
[47]   Enhanced Life Ion Source For Germanium And Carbon Ion Implantation [J].
Hsieh, Tseh-Jen ;
Colvin, Neil ;
Kondratenko, Serguei .
ION IMPLANTATION TECHNOLOGY 2012, 2012, 1496 :372-375
[48]   CHARACTERIZATION OF A MULTIPOLE ION-SOURCE FOR ION-IMPLANTATION [J].
COPE, D ;
KELLER, JH .
JOURNAL OF APPLIED PHYSICS, 1984, 56 (01) :96-100
[49]   USE OF COMPOUND SEMICONDUCTORS IN A SPUTTERING ION SOURCE FOR ION IMPLANTATION [J].
ALLEN, RM .
NUCLEAR INSTRUMENTS & METHODS, 1970, 84 (02) :325-&
[50]   Ion density variation effects in plasma source ion implantation [J].
Mukherjee, S .
SURFACE & COATINGS TECHNOLOGY, 2002, 156 (1-3) :115-118
12345