Bernas ion source modifications for platinum and aluminum ion implantation

被引：0
|
作者：
Medulla, C.
Raspagliesi, M.
机构：
来源：
Review of Scientific Instruments | 1998年 / 69卷 / 2 pt 2期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Bernas ion source modifications for platinum and aluminum ion implantation (abstract)
    Medulla, C
    Raspagliesi, M
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (02) : 862 - 862
  • [2] CHARACTERIZATION OF A BERNAS ION-SOURCE FOR MULTIPLY-CHARGED ION-IMPLANTATION
    WALTHER, SR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04) : 1307 - 1309
  • [3] Bernas ion source for Genus Tandetron ion implanters
    Sakase, T
    Maciejowski, PE
    Leavitt, WH
    Tokoro, N
    ION IMPLANTATION TECHNOLOGY - 96, 1997, : 407 - 410
  • [4] Bernas ion source discharge simulation
    Roudskoy, I.
    Kulevoy, T. V.
    Petrenko, S. V.
    Kuibeda, R. P.
    Seleznev, D. N.
    Pershin, V. I.
    Hershcovitch, A.
    Johnson, B. M.
    Gushenets, V. I.
    Oks, E. M.
    Poole, H. P.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 79 (02)
  • [5] Negative decaborane ion beam from ITEP bernas ion source
    Petrenko, S. V.
    Kuibeda, R. P.
    Kulevoy, T. V.
    Batalin, V. A.
    Pershin, V. I.
    Koslov, A. V.
    Stasevich, Yu. B.
    Koshelev, V. A.
    Hershcovitch, A.
    Johnson, B. M.
    Oks, E. M.
    Gushenets, V. I.
    Poole, H. J.
    PRODUCTION AND NEUTRALIZATION OF NEGATIVE IONS AND BEAMS, 2007, 925 : 333 - +
  • [6] Decaborane beam from ITEP bernas ion source
    Kulevoy, TV
    Petrenko, SV
    Kuibeda, RP
    Batalin, VA
    Pershin, VI
    Koslov, AV
    Stasevich, YB
    Hershcovitch, A
    Johnson, BM
    Oks, EM
    Gushenets, VI
    Poole, HJ
    Storozhenko, PA
    Gurkova, EL
    Alexeyenko, OV
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (03)
  • [7] ITEP Bernas ion source with additional electron beam
    Kulevoy, TV
    Kuibeda, RP
    Petrenko, SV
    Batalin, VA
    Pershin, VI
    Kropachev, GN
    Hershcovitch, A
    Johnson, BM
    Gushenets, VI
    Oks, EM
    Poole, HJ
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (03)
  • [8] NITROGEN PLASMA SOURCE ION-IMPLANTATION OF ALUMINUM
    WALTER, KC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 945 - 950
  • [9] CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER
    Hong, In-Seok
    Lee, Hwa-Ryun
    Trinh, Tu Anh
    Cho, Yong-Sub
    NUCLEAR ENGINEERING AND TECHNOLOGY, 2009, 41 (05) : 709 - 714
  • [10] PERFORMANCE OF A MODIFIED CALUTRON-BERNAS ION-SOURCE
    PRATAP, R
    LAL, KB
    SALVI, VP
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) : 481 - 483
12345