Zirconium Nitride by XPS

被引：0

作者：

Department of Physical and Organic Chemistry, Jamova 39, Ljubljana ^{[1
]}

1001, Slovenia

不详 ^{[2
]}

D-40225, Germany

不详 ^{[3
]}

1001, Slovenia

机构：

来源：

Surface Science Spectra | 1998年 / 5卷 / 02期

关键词：

Fine grain structure - Grainsize - Intermediate layers - Kα - Plasma beam - Spectra's - Sputtering techniques - Steel substrate - XPS measurements - Zirconium nitride coatings;

D O I：

暂无

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摘要：

Zirconium nitride (ZrN) coatings have been deposited on polished steel substrates by a plasma-beam sputtering technique in a Sputron apparatus (Balzers A. G.) at 200 °C. A thin intermediate layer of Zr (0.08 μm) was deposited between the substrate and the 2.8 μm thick ZrN coating. The average roughness, Ra, of the substrate was © 1998 American Vacuum Society.

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页码：152 / 158