X-ray photoelectron spectroscopy (XPS) and X-ray photoelectron diffraction (XPD) were used to study oxygen adsorption on the Ti(0001) surface in a vacuum at a temperature of 300 K and exposures of 0400L. The mechanism of oxygen interaction with titanium at various stages of adsorption and the conditions for the formation of surface oxide structures of titanium on the Ti(0001) face are considered.