Advanced PECVD processes for highly electron emitting diamond-like-carbon

被引：0
|
作者：
Jang, J. [1 ]
Moon, J.H. [1 ]
Han, E.J. [1 ]
Chung, S.J. [1 ]
机构：
[1] Department of Physics, Kyung Hee Univ., D., Seoul, Korea, Republic of
来源：
Thin Solid Films | 1999年 / 341卷 / 01期
关键词：
Number:; 95-0300-15-01-3; Acronym:; KOSEF; Sponsor: Korea Science and Engineering Foundation;
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页码：196 / 201
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