IN-PROCESS WAFER TEST AND MEASUREMENT.

被引：0

作者：

Dey, Jim ^{[1
]}

机构：

[1] Micro Image Techniques, Los Gatos,, CA, USA, Micro Image Techniques, Los Gatos, CA, USA

来源：

Semiconductor International | 1988年 / 11卷 / 01期

关键词：

INTEGRATED CIRCUIT TESTING - PROCESS CONTROL;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Major investments in equipment development, traditionally directed toward improvements in wafer processing equipment, are increasingly going into development of instrumentation for better ways of monitoring and controlling wafer-processing production. The reasons for this trend are rooted in both economics and technology: Process control is cost-effective because it increases device yields and performance. It also enables semiconductor manufacturers to produce more complex integrated circuits that, in turn, require more process control.

引用

页码：52 / 55

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