Mechanical properties of TiN films with preferred orientation by nano-indentation method

被引：0
|
作者：
Matsumuro, Akihito [1 ]
Watanabe, Tomohiko [1 ]
Hayashi, Toshiyuki [1 ]
Muramatsu, Mutsuo [1 ]
Takahashi, Yutaka [2 ]
机构：
[1] Dept. of Micro System Eng., Nagoya Univ., Chikusa-ku, Nagoya, 464-8603, Japan
[2] Dept. of Mech. Eng., Mie Univ., Kamihama-cho, Tsu, 514-0008, Japan
来源：
Zairyo/Journal of the Society of Materials Science, Japan | 1999年 / 48卷 / 12期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
16
引用
收藏
页码：1423 / 1427
相关论文
共 50 条
  • [31] Step Nano-mechanical Behavior of SnAgCu Solder Joints under nano-indentation method
    Wang, Lifeng
    Liu, Haitao
    Dai, Wenqin
    Zhang, Pule
    2016 17TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT), 2016, : 674 - 678
  • [32] Investigation of mechanical and tribological properties of bone cement by nano-indentation and nano-scratch experiments
    Karimzadeh, A.
    Ayatollahi, M. R.
    POLYMER TESTING, 2012, 31 (06) : 828 - 833
  • [33] Correlation Analysis of Surface Tilt Effect on Its Mechanical Properties by Nano-indentation
    Wang, Lei
    Liu, Xianping
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2019, 20 (03) : 327 - 335
  • [34] Micro-Mechanical Behavior of HOPG in Nano-Indentation
    FU Hui-nan
    厦门大学学报(自然科学版), 2002, (S1) : 82 - 83
  • [35] Optimization of a Piezoelectric Mechanical Amplifier Actuator for Nano-Indentation
    Purohit, Pranati
    Elizabeth, Indu
    Kumar, S. Seela
    Kumar, Sushil
    INTEGRATED FERROELECTRICS, 2019, 202 (01) : 144 - 150
  • [36] Nano-indentation characterisation of PECVD silicon nitride films
    Winchester, KJ
    Dell, JM
    COMMAD 2000 PROCEEDINGS, 2000, : 117 - 120
  • [37] Analysis of nano-indentation measurements on carbon nitride films
    Kusano, Y
    Hutchings, IM
    SURFACE & COATINGS TECHNOLOGY, 2003, 169 : 739 - 742
  • [38] Mechanical characterization of KMPR by nano-indentation for MEMS applications
    Ou, K.-S.
    Yan, H.-Y.
    Chen, K.-S.
    Strain, 2008, 44 (03): : 267 - 271
  • [39] Nano-indentation of copper thin films on silicon substrates
    Suresh, S
    Nieh, TG
    Choi, BW
    SCRIPTA MATERIALIA, 1999, 41 (09) : 951 - 957
  • [40] Determination of mechanical properties of geomaterials based on nano-indentation tests and fraction order models
    Zhuravkov, M. A.
    Romanova, N. S.
    JOURNAL OF MINING SCIENCE, 2016, 52 (02) : 207 - 217
12345