Mechanical properties of TiN films with preferred orientation by nano-indentation method

被引：0
|
作者：
Matsumuro, Akihito [1 ]
Watanabe, Tomohiko [1 ]
Hayashi, Toshiyuki [1 ]
Muramatsu, Mutsuo [1 ]
Takahashi, Yutaka [2 ]
机构：
[1] Dept. of Micro System Eng., Nagoya Univ., Chikusa-ku, Nagoya, 464-8603, Japan
[2] Dept. of Mech. Eng., Mie Univ., Kamihama-cho, Tsu, 514-0008, Japan
来源：
Zairyo/Journal of the Society of Materials Science, Japan | 1999年 / 48卷 / 12期
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摘要：
16
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页码：1423 / 1427
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