ERROR IN THE DETERMINATION OF THE DIELECTRIC PROPERTIES AND THICKNESS OF SURFACE LAYERS BY THE METHOD OF RADIOMETRIC ELLIPSOMETRY.

被引：0

作者：

Konev, V.A. ^{[1
]}

Tikhanovich, S.A. ^{[1
]}

Zhigalko, M.I. ^{[1
]}

机构：

[1] Acad of Sciences of the Belorussian, SSR, USSR, Acad of Sciences of the Belorussian SSR, USSR

来源：

The Soviet journal of nondestructive testing | 1986年 / 22卷 / 06期

关键词：

DIELECTRIC PROPERTIES - Measurements - MATHEMATICAL TECHNIQUES - Error Analysis;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

An algorithm was worked out for calculating the parameters of dielectric surface layers on the basis of the results of measurements by the method of radio-wave ellipsometry. An analysis is carried out of the error of determining the dielectric permeability of coatings in dependence on the accuracy of measurements of the polarization characteristics of the reflected wave.

引用

页码：363 / 366