LASER ANNEALING.

被引：0
|
作者：
Ready, J.F.
McClure, B.Thompson
Larson, W.L.
机构：
来源：
Semiconductor International | 1981年 / 4卷 / 11期
关键词：
HEAT TREATMENT - Annealing - LASER BEAMS - Applications;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Laser annealing techniques as a possible replacement of conventional furnace annealing in semiconductor processing are discussed.
引用
收藏
页码：93 / 112
相关论文
共 50 条
  • [1] SURFACE STRUCTURES AFTER PULSED LASER ANNEALING.
    D'Anna, E.
    De Blasi, C.
    Leggieri, G.
    Luches, A.
    Nassisi, V.
    1600, (31): : 9 - 10
  • [2] ACTIVATION OF POLYSILICON CONNECTIONS BY SELECTIVE CW LASER ANNEALING.
    Calder, I.D.
    Naguib, H.M.
    Electron device letters, 1985, EDL-6 (10): : 557 - 559
  • [3] DETERMINATION OF THRESHOLD POWER FOR SEMICONDUCTOR MELTING DURING LASER ANNEALING.
    Edelman, Piotr
    Kontkiewicz, Andrzej M.
    Electron Technology (Warsaw), 1985, 17 (3-4): : 25 - 33
  • [4] The minima temperatures of annealing.
    Hanriot
    Lahure
    COMPTES RENDUS HEBDOMADAIRES DES SEANCES DE L ACADEMIE DES SCIENCES, 1914, 158 : 262 - 264
  • [5] Recrystallisation caused by annealing.
    Gaubert, P
    COMPTES RENDUS HEBDOMADAIRES DES SEANCES DE L ACADEMIE DES SCIENCES, 1921, 173 : 1089 - 1092
  • [6] ALTERNATIVES TO FURNACE ANNEALING.
    Iscoff, Ron
    Semiconductor International, 1985, 8 (05) : 78 - 84
  • [7] TIME RESOLVED CALORIMETRY OF Te FILMS DURING PULSED LASER ANNEALING.
    Coufal, H.
    Lee, W.
    Applied physics. B, Photophysics and laser chemistry, 1987, B44 (02): : 141 - 146
  • [8] CW LASER ANNEALING OF POLYCRYSTALLINE SILICON ON SIO2 ANDEFFECTS OF SUCCESSIVE FURNACE ANNEALING.
    KUGIMIYA, KOICHI
    FUSE, GENSHU
    INOUE, KAORU
    1982, V 21 (N 1): : 19 - 21
  • [9] DIFFUSION, ION IMPLANTATION AND ANNEALING.
    Burggraaf, Pieter S.
    1600, (06):
  • [10] INTRODUCTION OF DEFECTS IN ION-IMPLANTED SILICON DURING LASER ANNEALING.
    Bao Ximao
    Hang Xinfan
    Guo He
    Zhang Mei
    Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 1983, 4 (06): : 596 - 600
12345