Novel and convenient method for monitoring processing plasma: The insulated pulse probe method

被引：0

|

作者：

Deguchi, Mikio ^{[1
]}

Itatani, Ryohei ^{[1
]}

机构：

[1] Niihama Natl Coll of Technology, Ehime, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1998年 / 37卷 / 3 A期

关键词：

Insulated pulse probe plasma - Langmuir probe method;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

收藏

页码：970 / 980

相关论文

共 50 条

[31] A Novel Method of Impeller Blade Monitoring Using Shaft Vibration Signal Processing
Liska, Jindrich
Vasicek, Vojtech
Jakl, Jan
SENSORS, 2022, 22 (13)
[32] PULSE MONITORING - METHOD OF DETECTION OF CARDIAC ARREST
HART, RM
MEDICAL JOURNAL OF AUSTRALIA, 1962, 1 (08) : 280 - +
[33] Bearing condition monitoring by the shock pulse method
SPM Instrument Inc, Marlborough, United States
Iron Steel Eng, 12 (40-43):
[34] Pulse oximetry: A practical, efficient monitoring method
Grosenbaugh, DA
Muir, WW
VETERINARY MEDICINE, 1998, 93 (01) : 60 - +
[35] MONITORING BEARINGS WITH THE SHOCK PULSE METHOD.
Sundberg, Anders
PIMA, 1984, 66 (07): : 57 - 59
[36] A pulse-compression method for process monitoring
Wu, NE
Wang, XX
PROCEEDINGS OF THE 2001 AMERICAN CONTROL CONFERENCE, VOLS 1-6, 2001, : 2127 - 2130
[37] A METHOD FOR DETERMINATION OF PLASMA POTENTIAL BY AN RF PROBE
DOTE, T
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1968, 24 (01) : 224 - &
[38] A Probe Method for Microwave Diagnostics of Pulsed Plasma
Deshko, K. I.
Chernikov, V. A.
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2018, 61 (06) : 838 - 841
[39] A Probe Method for Microwave Diagnostics of Pulsed Plasma
K. I. Deshko
V. A. Chernikov
Instruments and Experimental Techniques, 2018, 61 : 838 - 841
[40] A Novel and Convenient Method for Synthesis of Carbamoyl and Thiocarbamoyl Phosphonates
Kaboudin, Babak
Zahedi, Hazegh
HETEROATOM CHEMISTRY, 2009, 20 (04) : 250 - 253

← 1 2 3 4 5 →