Novel and convenient method for monitoring processing plasma: The insulated pulse probe method

被引：0
|
作者：
Deguchi, Mikio [1 ]
Itatani, Ryohei [1 ]
机构：
[1] Niihama Natl Coll of Technology, Ehime, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1998年 / 37卷 / 3 A期
关键词：
Insulated pulse probe plasma - Langmuir probe method;
D O I：
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学科分类号：
摘要：
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页码：970 / 980
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