A wireless surface acoustic wave temperature sensor using langasite as substrate material for high-temperature applications

被引：0

作者：

Wang, Shou-Qi ^{[1
]}

Harada, Jiro ^{[1
]}

Uda, Satoshi ^{[1
]}

机构：

[1] Electronics Device R and D Center, Mitsibushi Materials Corporation, 2270 Yokoze, Chichibu, Saitama 368-8503, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2003年 / 42卷 / 9 B期

关键词：

Curve fitting - Electrodes - High temperature applications - Impedance matching (electric) - Piezoelectric materials - Temperature measurement - Transducers;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A wireless surface acoustic wave (SAW) temperature sensor was produced using langasite single crystal as a piezoelectric substrate. The properties of both solid-electrode and split-electrode interdigital transducers (IDTs) were studied by fitting the admittance curves. A miniature antenna was used and the impedance matching technique between the antenna and the IDT was investigated. The temperature characteristic in the temperature range of 20-700°C was measured. The results showed that both the SAW chip and the antenna functioned in this temperature range.

引用

页码：6124 / 6127