Characterization of YBCO superconducting films fabricated by pulsed laser deposition

被引：0

作者：

Kim, Sung-Min ^{[1
]}

Lee, Sang Yeol ^{[1
]}

机构：

[1] Department of Electrical Engineering, Yonsei University, 120-749, Seoul, Korea, Republic of

来源：

Thin Solid Films | 1999年 / 355卷

关键词：

Crystal orientation - Deposition - Film preparation - Laser ablation - Magnesia - Oxygen - Pulsed laser applications - Substrates - X ray crystallography - Yttrium barium copper oxides;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

YBa2Cu3O7-δ thick films with the thickness in the range of 1000-2000 nm including different orientations were investigated for the application of microwave devices. Pulsed laser deposition (PLD) has been used to deposit superconducting YBCO thick films on cleaved and polished (100) MgO substrates (10×10 mm). A Nd:YAG laser with the wavelength of 355 nm was used. A YBa2Cu3O7-δ film was grown at 750 °C in the oxygen partial pressure of 2.7 Pa and annealed at 550 °C for 30 min in 6.7×104 Pa oxygen pressure, then cooled down to room temperature. Four-point probe measurement and X-ray diffraction (XRD) were used to reveal the properties of superconducting YBCO films. The transition temperatures of these films are in the range of 86-89 K. Two types of X-ray diffraction standard θ-2θ technique and a glancing angle technique were used to characterize the laser ablated thick films. A glancing angle XRD was adopted to examine the orientation change step by step by varying X-ray incident angles in a laser ablated thick film. We have verified that the mixture of a-axis and c-axis orientation was strongly dominated near at the top of the film in a laser ablated thick film. A variation of the surface resistance of the films with different film thicknesses was observed.

引用

页码：461 / 464