Sensors on low-dimensional silicon structures

被引：0
|
作者：
Bilenko, D. [1 ]
Belobrovaya, O. [1 ]
Jarkova, E. [1 ]
Coldobanova, O. [1 ]
Mysenko, I. [1 ]
Khasina, E. [1 ]
机构：
[1] Saratov State Univ, Saratov, Russia
来源：
Sensors and Actuators, A: Physical | 1997年 / 62卷 / 1 -3 pt 3期
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页码：621 / 623
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