Compact high-current microwave-driven ion source

被引:0
|
作者
机构
来源
Rev Sci Instrum | / 1卷 / 65期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] A compact high-current microwave-driven ion source
    Wills, JSC
    Lewis, RA
    Diserens, J
    Schmeing, H
    Taylor, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (01): : 65 - 68
  • [2] Microwave-driven multipurpose ion source
    Jayamanna, K
    Yuan, D
    Kuo, T
    McDonald, M
    Schmor, PW
    Dutto, G
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03): : 1061 - 1063
  • [3] Microwave-driven multipurpose ion source
    Rev Sci Instrum, 3 pt 2 (1061):
  • [4] Microwave-driven negative ion source
    Rev Sci Instrum, 3 pt 2 (1227):
  • [5] A microwave-driven negative ion source
    Wills, JSC
    Schmeing, H
    Diamond, WT
    Diserens, J
    Imahori, Y
    Taylor, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03): : 1227 - 1229
  • [6] Minipermanent magnet high-current microwave ion source
    Song, Zhizhong
    Peng, Shixiang
    Yu, Jinxiang
    Ming, Jianchuan
    Yuan, Zhongxi
    Qian, Feng
    Guo, Zhiyu
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (03):
  • [7] MICROWAVE ION-SOURCE FOR HIGH-CURRENT IMPLANTER
    SAKUDO, N
    TOKIGUCHI, K
    KOIKE, H
    KANOMATA, I
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (07): : 940 - 943
  • [8] HIGH-CURRENT ION IMPLANTER USING MICROWAVE ION-SOURCE
    SAKUDO, N
    TOKIGUCHI, K
    KOIKE, H
    KANOMATA, I
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : C155 - C155
  • [9] HIGH-CURRENT ION IMPLANTER USING A MICROWAVE ION-SOURCE
    SAKUDO, N
    TOKIGUCHI, K
    KOIKE, H
    KANOMATA, I
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1983, 54 (06): : 681 - 684
  • [10] A HIGH-CURRENT MICROWAVE ION-SOURCE FOR ION-IMPLANTATION
    WALTHER, SR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04): : 2562 - 2564