Quartz resonant micro-structures as sensing elements for temperature sensors

被引：0
|
作者：
Leblois, T.G. [1 ]
Tellier, C.R. [1 ]
机构：
[1] Ecole Nationale Superieure de, Mecanique et des Microtechniques, Besancon, France
来源：
Proceedings of the Annual IEEE International Frequency Control Symposium | 1999年 / 2卷
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摘要：
9
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页码：1045 / 1048
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