SCANNING PHOTON MICROSCOPE FOR NON-DESTRUCTIVE OBSERVATIONS OF CRYSTAL DEFECT AND INTERFACE TRAP DISTRIBUTIONS IN SILICON WAFERS.

被引：0
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作者：
Kinameri, K. [1 ]
Munakata, C. [1 ]
Mayama, K. [1 ]
机构：
[1] Hitachi Ltd, Kokubunji, Jpn, Hitachi Ltd, Kokubunji, Jpn
来源：
| 1600年 / 21期
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MICROSCOPES
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