Role of reaction products in F- production in low-pressure, high-density CF4 plasmas

被引：0
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作者：
Hayashi, Daiyu [1 ]
Nakamoto, Masahiko [1 ]
Takada, Noriharu [1 ]
Sasaki, Koichi [1 ]
Kadota, Kiyoshi [1 ]
机构：
[1] Department of Electronics, Nagoya University, Nagoya 464-8603, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 10期
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页码：6084 / 6089
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